Thin Film
layer of material ranging < a nanometer to > a micrometer in thickness.
See Also: Film, Ellipsometers
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Scatterometers/ Thin Film Metrology Systems
LittleFoot Series
The n&k LittleFoot-CD, and LittleFoot-CD450 are DUV-Vis-NIR scatterometers/thin film metrology systems, based on polarized reflectance measurements (Rs and Rp) from 190nm to 1000nm, with microspot technology. The systems in the LittleFoot-CD Series determine thickness, n and k spectra from 190nm-1000nm of thin films, as well as depths, CDs, and profiles of trenches and contact holes.
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Metrology Solutions for Semiconductors
Bruker Semiconductor develops, manufactures, markets, and supports metrology solutions for thin films, which are based on novel, rapid, non-contacting and non-destructive X-ray technology. With Bruker’s acquisition of Jordan Valley Semiconductors, a name synonymous with unparalleled worldwide customer service and support, 75% of the world's top 25 semiconductor manufacturers rely on Bruker metrology tools for front-end and back-end applications, including development of their next-generation thin films. Bruker commitment to innovation and technology leadership drives the continued release of new advancements in metrology, and has garnered numerous awards and industry recognition.
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Thin Film Chip Resistors, High Voltage Type
Panasonic Industrial Devices Sales Company of America
Thin Film Chip Resistors, High Voltage Type by Panasonic
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Filters / Splitters / Detectors
DiCon’s 100 GHz WDM is designed to multiplex and demultiplex signals in multi-wavelength systems based on the ITU 100 GHz grid. The component uses a thin film filter mounted between a pair of GRIN lens collimators. The 100 GHz WDM is housed in a compact, environmentally stable package that offers superior resistance to humidity and temperature and is suitable for mounting on a printed circuit board or within a module.
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Stress Hysteresis Measurement
500 Series
Stress Hysteresis Measurement up to 500C for thermal property and stability tests of thin films in air.Non-Contact Laser Scanning Technology.
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Vibrating Sample Magnetometer
VSM-P2H
This is low magnetic field type of exclusive use for soft thin film sample by the use of Helmholtz Coil.The type is capable of measuring variations of temperature from -50°C to 200°C by adding gas-flow type of temperature controller as an option.
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100GHz DWDM Optical Add/Drop Multiplexer (CATV Overlay Multiplexer)
OADM-1001-VOA (100GHz)
Hangzhou Huatai Optic Tech. Co., Ltd.
Huatai OADM-1001-VOA is an optical Add-Drop multiplexer with 100GHz channel interval. It is based on mature thin film filter technology, sealed with metal shell, and featured with low insertion loss, high isolation, wide channel and flexible configuration. It is the ideal device to Add(insertion Add)/Drop(Tape-out Drop) a specific wavelength(OADM) in optical fiber DWDM system. OADM-1001-VOA configures a manual-adjust optical attenuation, for adjust the equilibrium the optical power between insert channel and main signal channel, which is conveniently used for VOD overlay in CATV system.
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Microspectrophotometer
MSP Series
Angstrom Sun Technologies, Inc.
Microspectrophotometer (MSP) is an advanced optical system. The key difference with typical low cost reflectometer is in its capability to characterize optical properties of thin films over a micron region area. With unique design by Angstrom's professionals, user can enjoy digital imaging capability in Microspectrophotometers (MSP series) by live video, powerful digital editing, measurement tools for reflection, transmission, absorption spectra. Data acquisition only takes milliseconds.
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Thin Film Based Thermopile Detector: 2 or 1 Channels
DR46
A two-channel or a one-channel compensated thin-film thermopile in a TO-8 package. Each active area is 4mm x 0.6mm. Offers high output with excellent signal-to-noise ratio. An internal aperture minimizes channel-to-channel crosstalk increasing sensitivity.
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Benchtop Metrology Solution
FilmTek 2000 PAR-SE
Scientific Computing International
Our most advanced benchtop metrology solution, engineered to meet the needs of nearly any advanced thin film measurement application, from R&D to production. Combines spectroscopic ellipsometry and DUV multi-angle polarized reflectometry with a wide spectral range to deliver the highest accuracy, precision, and versatility in the industry. Patented parabolic mirror technology allows for a small spot size down to 50µm, ideal for direct measurement of product wafers and patterned films.
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Remote Plasma Sources
Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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3 port FWDM in 1U Rackmount
Flyin Optronics' Micro-Optical WDM utilizes thin film coating technology and proprietary design of non-flux metal bonding micro optics packaging. It provides low insertion loss, high channel isolation, low temperature sensitivity and epoxy free optical path.
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Semiconductor Technology, Micro Scriber + Flatness, Bow, Warp, Curvature, Glass Thickness
FLATSCAN
Optik Elektronik Gerätetechnik GmbH
Non contact automated 2D- or 3D measurement of warp, bow, slope and surface curvature with software module for calculation of thin film stress (wafer stress) of wafers and glass substrates.
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XRD Diffractometers
Empyrean Range
With the Empyrean, Malvern Panalytical has set the new standard in developing the ultimate X-ray platform for the analysis of powders, thin films, nanomaterials and solid objects.
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Thin Film Chip Resistors, High Stability and Reliability Type
ERA-XV/ERA-XK Series
Panasonic Industrial Devices Sales Company of America
Anti-Sulfurated Thin Film Chip Resistors From Panasonic For Dependable, Accurate And Reliable Performance In Extremely Hazardous EnvironmentsPanasonic's ERA-xV and ERA-xK Series Thin Film Chip Resistors feature a soft terminal and passivated layer. With a total of 2,889 part number variants, Panasonic ERA-xV and ERA-xK Series Resistors provide design engineers with a wide array of Resistors to choose from specifically developed to handle extremely hazardous and challenging application environments.
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Powerful and Cost Effective Spectroscopic Ellipsometer
Smart SE
The Smart SE from HORIBA Scientific is a versatile spectroscopic ellipsometer for fast and accurate thin film measurements. It characterizes thin film thickness from a few Angstroms to 20µm, optical constants (n,k), and thin film structure properties (such as roughness, optical graded and anisotropic layers, etc).The spectral range from 450 to 1000nm is measured in a few seconds and ellipsometric data are analyzed using the DeltaPsi2 software platform. The software integrates two levels of software to fulfil both routine analysis with predefined recipes and advanced analysis with state-of-the art ellipsometric modelling.
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Materials Metrology
Nova Measuring Instruments Inc.
Nova is a market leader for innovative thin film metrology and process control technologies. We develop highly sensitive in-line metrology solutions on high productivity platforms, thereby enabling critical metrology solutions to be closer to a semiconductor fab’s process and integration needs.Our technologies enable customers to accurately detect and quantify small variations in film composition and thickness, thereby influencing better device functionality, and improved manufacturing yield.
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Infiniium Oscilloscopes
Z‑Series
The Infiniium Z-Series delivers this and more with its RealEdge technology enabling 63 GHz of oscilloscope bandwidth and superior signal integrity. The Z-Series takes advantage of indium phosphide chip technology and custom thin film packaging to give you extremely low noise, low jitter, and high effective number of bits. These technologies allow you to see the true representation of your signal.
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Inductor Coils
SemiGen's Inductor Coils are manufactured using our thin film process on quartz substrates. The precision photolithography and non-chemical etching process provides clean edges to assure uniformity from coil to coil. By using quartz and applying a polyimide coating we produce a device that eliminates the need for conformal coating or staking. Inductors can be epoxied down with nonconductive epoxy and the wire bonded for connection.
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PED Systems
Pulsed Electron Deposition
Is a process in which a pulsed (80-100 ns) high power electron beam (~1000 A, 15 kV) penetrates approximately 1 μm into the target resulting in a rapid evaporation of target material. The non-equilibrium heating of the target facilitates stoichiometric ablation of the target material. Under optimum conditions, the target stoichiometry is preserved in the deposited films. All solid state materials – metals, semiconductors and insulators, including those transparent to laser wavelengths in PLD – can be deposited as thin films with PED. By combining PLD and PED, the range of complex materials that can be prepared as thin films can be greatly enhanced.
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6-Axis Robotic Automated Testing System
AT6
The Instron AT6 Automated Testing System utilizes an innovative design for the automatic tensile and/or flexural testing of metals, plastics, thin films, components, elastomers, sutures, and composites. Conforming to ISO and ASTM standards for a wide range of materials, this system has a flexible platform to deliver high throughput with repeatable results for a variety of testing needs.
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Ultra Thin Film Scratch Tester
CSR5100
The micro-scratch method (JIS R-3255), which is an evolution of the scratch method that evaluates the adhesion strength between the thin film formed on the material surface and the base material, enables the detection of peeling of thin films. detection, we have a highly sensitive destruction detection mechanism based on our own patented technology (Patent No. 5070146) to evaluate the adhesion strength of ultra-thin
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TFProbe Wafer Measurement Tools
Angstrom Sun Technologies, Inc.
Angstrom Sun Technologies Inc offers optical measurement and inspection systems for semiconductor and related industries. Its core products include wafer measurement systems, spectroscopic ellipsometers, thin film reflectometers, and microspectrophotometers.
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Spectroscopic Ellipsometers
M-2000
The M-2000 line of spectroscopic ellipsometers is engineered to meet the diverse demands of thin film characterization. An advanced optical design, wide spectral range, and fast data acquisition make it an extremely powerful and versatile tool.
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Thin Film Based Thermopile Detector: 3 Channels
TM34
A three-channel thin-film thermopile in a TO-8 package. Each symmetrically positioned active area is 3.16mm x 0.4mm. Offers low noise output and internal aperture minimizing channel-to-channel crosstalk while increasing sensitivity.
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Trace Moisture Analyzer
Model 8800P
Teledyne Analytical Instruments
The 8800 series uses field proven aluminum oxide (Al2O3) sensing technology to accurately detect trace moisture on either a continuous or spot checking basis. All Al2O3 sensors share the same basic operating principle: the capacitance measured between the sensor’s aluminum core and gold film deposited on the oxide layer varies with the water content. The 8800 series moisture sensor employs unique Hyper Thin Film (HTF) technology, which offers three major structural improvements in Al2O3 sensor d...show more -
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Thin Film Current Sensing Chip Resistors
CSTN
*Thin film process*High power rating up to 3 watts in 2512 size*Resistance values from 50m to 1ohm*High purity alumina substrate for high power dissipation*Power management applications*Switching power supply*Over current protection in audio applications*Voltage regulation module (VRM)*DC-DC converter, battery pack, charger, adaptor,*Automatic engine control*Disk drive
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Spectroscopic Ellipsometer
PH-SE
The spectroscopic ellipsometer is used for thin film and material characterization in R & D. The spectroscopic ellipsometer is designed to meet the requirements in modern research with special emphasis on speed and accuracy for an unmatched variety of applications.